Multilayer optics is a field that exploits the interference of X-rays or extreme ultraviolet radiation reflected off precisely engineered nanoscale layers. By depositing alternating thin films of ...

An X-ray free-electron laser (XFEL) is an X-ray produced by a beam of free electrons that have been accelerated almost to the speed of light. XFELs produce laser beams with exceedingly high peak power ...

With the recent explosive demand for data storage, ranging from data centers to various smart and connected devices, the need for higher-capacity and more compact memory devices is constantly ...

Extreme ultraviolet (EUV) lithography is a soft X-ray technology, which has a wavelength of 13.5nm. Today’s EUV scanners enable resolutions down to 22nm half-pitch. In a system, an EUV light source ...